Micromachine Summit
Micromachine Summit

Micromachine Summit

MMS 2006



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Past Events

Micromachine Summit Delegations, Americas

Chief Delegate, Canada: Dan Gale

Dan GaleDan Gale is Vice-President of CMC Microsystems. He has more than twenty years of experience in the microsystems sector during which he developed and shaped CMC programs to enable university researchers to collaborate with industry through access to leading-edge technologies — a portfolio that now includes photonics, microfluidics, MEMS, microelectronics and related design and test tools.


He graduated in 1978 from Queen's University in Kingston, Canada, with an MSc in Electrical Engineering and conducted communications research in England with Professor Peter Clarricoats (University of London, Queen Mary College) and as a research fellow (University of Surrey).


CMC MicrosystemsIn 2000, he led an initiative for a national System-on-Chip Research Network involving 33 universities that is funded by the Canada Foundation for Innovation and Ontario Innovation Trust. In 2001, similar effort led to a funding award for the National Microelectronics and Photonics Testing Collaboratory, involving 21 universities and supported by the same Foundation plus three provincial agencies. On a continuing basis he is an officer of the CMC Board, Vice-Chairman of the corporate Technical Advisory Committee and a Chief Delegate (Canada) to the annual World Micromachine Summit.

In 1982, he returned to join the research program in microelectronics that preceded the formation of CMC. He has authored several technical papers, journal articles and conference papers.

Mr. Gale has been instrumental in building MANCEF initiatives and partnerships in Canada. Through CMC, Dan has been a major contributor to the success of COMS 2004 and linking the event to the larger Canadian Micro-Nano community.

Dr. Sven Achenbach

Sven AchenbachCanada Research Chair in Micro and Nano Device Fabrication, Associate Professor of Electrical Engineering (University of Saskatchewan), Adjunct Scientist (TRLabs, Canada), Research Scientist (Forschungszentrum Karlsruhe, Germany), Saskatoon, Saskatchewan, Canada

PAST AFFILIATIONS: Forschungszentrum Karlsruhe, Karlsruhe, Germany, Laboratoire pour l' Utilisation du Rayonnement Electromagnetique, (LURE), Paris, France


  1. University of Karlsruhe, Germany, 1992: Vordiplom (Bachelor), Mech. Engin.
  2. University of Karlsruhe, Germany, 1996: Diplom (Master), Mech. Engin.
  3. University of Karlsruhe, Germany, 2000: Doktor (Ph.D.), Microsystems Techn./ M.E.

University of SaskatchewanMAJOR PROFESSIONAL AREAS OF INTEREST: X-ray lithography, LIGA, process technology, photonics

Sven Achenbach was born in 1969 in Juelich/Germany. He studied mechanical engineering at the University of Karlsruhe. In 1996, he was a research foundationer at the national laboratory LURE in Paris, optimizing microfabrication process technologies.

TR LabsWorking at the Forschungszentrum Karlsruhe, he received his Ph.D. on ultra deep X-ray lithography in 2000. Being appointed a member of an excellent researchers' program, he currently works on various aspects of X-ray lithography, including high resolution patterning.

In 2004, he was appointed a Canada Research Chair in Micro and Nano Device Fabrication. He assumed the chair in early 2005, working as an Associate Professor of Electrical Engineering at the University of Saskatchewan in Saskatoon.

A large portion of his work is related to the new Canadian Light Source (CLS) electron storage ring to design, build, commission and operate SyLMAND (Synchrotron Laboratory for Micro and Nano Devices), the Canadian X-ray lithography facility.

Chief Delegate, Latin America: Guillermo Fernandez de la Garza

President and Chief Executive Officer of the United States - Mexico Foundation for Science (FUMEC)

Guillermo Fernández de la GarzaExecutive Director ,The United States Mexico Foundation For Science, Mexico City, Mexico


  • Universidad Nacional Autónoma de México, Bachelor's Degrees in Engineering and in Physics
  • Stanford University, Master Degree in Engineering and Economics
  • Instituto Politécnico Nacional, Nuclear Engineering and Business Administration


  • Technological Innovation
  • Engineering
  • Science and Technological Education
  • Research
  • Energy
  • Industrial Development
  • Science and Technology Policy and Energy Efficiency

Fernández de la Garza has worked to develop regional innovation clusters, high tech business incubation and strengthening networks, as well as facilitating innovation in medium and small businesses.

He has also worked for the development of the Mexican network of Micro-Electro-Mechanical Systems, linking industry, universities and government in the definition of strategies, the development of technical and educational infrastructure, in the organization of business – university consortia to develop new MEMS based products and in the interaction with similar networks in other countries. Previously, he was advisor to UNIDO and to the governments of Brazil and Argentina in Microelectronics development strategies.

The United States - Mexico Foundation for ScienceFernández de la Garza has had a long experience in science and engineering education and public understanding activities. He has initiated activities related to a MEMS itinerant exhibition that is being linked to MANCEF education activities, working with specialized science centers in the United States and Mexico.


Mr. Fernandez de la Garza has bachelor's degrees in Engineering and in Physics from Mexico's National Autonomous University, a Master Degree in Engineering Economics from Stanford University and advanced studies in Nuclear Engineering and Business Administration from IPN and IPADE.

Delegate, Latin America: Daniel Lupi

Daniel LupiDaniel Lupi is presently the Director of the Research and Development Center for Telecommunication, Electronics and Informatics at the National Institute of Industrial Technology (INTI), having joined the Institution immediately after completing his Education (National University of Buenos Aires, Electromechanical Engineering, and electronics branch), (1975).

In 1999 he obtained the Master degree in Strategic Management of Innovation, ESST at the Ecole Polytechnique Fédérale de Laussane.

He is international Coordinator of an international Network of "Ibero-American" Research Centers for Test and Characterization of Microelectronic Devices and Systems.

National Institute of Industrial TechnologyHis research interests have included the application of the methods of measurement to practical problems. A parallel thread in his research has been the industrial sensors and particularly microsensors. He is author or co-author of several scientific papers. He is co-author of Sensores y Sus Aplicaciones, an introductory textbook.

Teaching activities have included university curriculum development in instrumentation and electrical measurements.

He is Professor in the National University of La Matanza, and leading several seminars for post graduate students.

He was leading the national branch of IBERNET project (Microtechnologies Industrial Applications, Training and Dissemination Network in Ibero-América), European Commission (2000-2001).

He was Program Chairman for several International Workshops in the field of transducers and their applications.

Delegate, Latin America: Hernan Valenzuela

Hernan ValenzuelaHernan Valenzuela currently serves as the Microelectronic Program Manager in charge of implementation of the new Microelectronic Cluster developing under the authority of the Superintendent of the Free Trade Zone of Manaus - SUFRAMA, a branch of the Brazilian Ministry of Development Industry and Foreign Trade. Hernan also heads Institutional Relations for Technological Affairs and is Senior Consultant for the Investment Promotions and Planning Superintedant at SUFRAMA


Mr. Valenzuela came from Colombia to Brazil in 1972, hired by TV Sanyo to work as a technician, and for 30 years since has worked across the telecommunications and manufacturing and foreign trade sectors. He held top plant management positions in the 1980's with Gradiente in Manaus and later headed Philips Telecommunications Service Division in São Paulo. Hernan eventually moved back to Amazônia state to offer his services in project evaluation, joint venture identification for both Brazilian and foreign companies, including Indian, Italian, French, and United States firms. Later, Hernan developed a specialty in advising companies on potential projects in the Amazônia area focused on economic and social opportunity with a small ecological footprint. Hernan's success in bringing foreign companies to the northwestern regions of Brazil has translated into advising the Superintendence of the Free Trade Zone of Manaus (SUFRAMA) on investment promotion, investment management, green energy projects, and tourism management. Today, Mr. Valenzuela is charged with implementing the creation of a Microelectronic Technology Cluster in Manaus as part of the larger economic development planning of the Brazilian Ministry of Development, Industry and Foreign Trade.


SUFRAMAMr. Valenzuela attended the Superior School of Telecommunications (ITEC) in Bogota, Colombia and the Federal University of the Amazon, Manaus, Brazil. He also received managerial and foreign trade training through Philips Telecommunications Division, Brazil and through the Center for Analysis, Research and Innovation. Hernan speaks English, Spanish, and Portuguese.

Chief Delegate, USA: Dr. Michael Gaitan

Michael GaitanMichael Gaitan received his Ph.D. in Electrical Engineering in 1988 from the University of Maryland, College Park. He is the Project Leader of the MicroElectroMechanical Systems (MEMS) Project, Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, NIST. He directs the MEMS Project activities in providing industry with standardized MEMS test structures and test methods for characterizing the thermo-electro-mechanical properties of thin-films used in IC and MEMS technologies; works with IC foundries to improve accessibility of MEMS manufacturing; and heads research and development of novel measurement applications of MEMS technology for our new programs in BioElectronics and Single Molecule Manipulation and Measurement (SM3).

NISTDr. Gaitan has been active in developing standard manufacturing practices and is recognized for developing the cif-MEMS (CMOS Integrated Circuit Foundry MEMS) process with the MOSIS service, one of the first MEMS foundry services in the US.

He is also active with international standardization activities for MEMS including the SEMI MEMS effort and is active with the International Micromachine Standardization Forum organized by Japan's Micromachine Center (MMC).

Dr. Gaitan has worked to establish the MEMS Alliance, an alliance of companies, universities, and government laboratories in the Washington DC metropolitan area whose mission is to create a group that networks expertise, capabilities, and research to facilitate the development of new applications and commercialization of miniaturization technologies.

Delegate, USA: Tom Cellucci

Tom CellucciTom Cellucci is the President and Chief Operating Officer at Zyvex, Inc located in Richardson, Texas, USA. Zyvex has earned a reputation as the nanotechnology leader by providing nanotechnology solutions for real-world applications with a growing product portfolio - comprised of tools, materials and structures.

Dr. Cellucci is the author or co-author of over 98 articles on nanotechnology, laser spectroscopy, environmental disturbance control, MEMS test and measurement, and high-tech sales and marketing.

Tom is on the board of Directors of the Laser Institute of America. In addition, Cellucci is a member of the Senatorial Trust - a small group of distinguished business and political leaders nominated by United States' Senators to meet on a regular basis with the highest-ranking members of the government.


Tom Cellucci holds a Ph.D. in Physical Chemistry from the University of Pennsylvania, an MBA from Rutgers University, and a B.S. in Chemistry from Fordham University.

Delegate, USA: Bob Sulouff

Bob SulouffMr. Sulouff is the Director of Business Development for the Micromachined products Division of Analog Devices Inc., Cambridge Massachusetts. He has led the start-up of an Optical MEMS business area at Analog Devices recently, and is now addressing the longer term strategic opportunities in BioMEMS and RFMEMS as well as special projects. He joined ADI 9 years ago as the Product Line Director for Accelerometers and took the business from it's first sales to the world's major market share producer of accelerometers.

Prior to ADI, for 7 years he was the Manager of Advanced Sensor Technology for Siemens Automotive, leading a MEMS R&D facility in the US and developing suppliers for production.

Preceding Siemens he was the Manager of Advance Sensor for Honeywell, Solid State Electronics Center in Plymouth Minnesota for 4 years.

Analog DevicesMr. Sulouff was the VP of Engineering and Technology at a start-up he helped found, Insouth Microsystems, Auburn Alabama; where he invented the first commercial MEMS accelerometer (G-Chip).


Mr. Sulouff was educated at the University of Central Florida with BS and MS degrees in engineering materials and with executive course work at MIT Sloan.

Delegate, USA: Steve Walsh

Steve WalshSteven Walsh is the Alfred Black Professor of Entrepreneurship and the Co-Director of the Technology Management Center at the University of New Mexico's Anderson School of Management, and an internationally renowned academic and businessman.

He has been a Director at a Fortune 5 Company Division, General Manager and Vice President of medium sized businesses and President of entrepreneurial and non-profit companies.

Steve received his BEng and Strategic Management PhD at Rennsselear Polytechnic Institute.

He has published over 100 articles serving both the academic and practitioner communities. He has assisted firms in gaining over $200 million in equity resources in the past four years.

University of New MexicoSteve has been a plenary or invited speaker for over 40 economic development groups and industrial organizations.

He is MANCEF's Founding Past President and Co-Editor of the international roadmap for MEMS and Top Down Nano technologies.

Updated: 24 April 2005