MMC recognizes the importance of international standards of MEMS,
and has been devoted to making an effort for IEC standardization. So far
several drafts of standardization were submit to IEC as to terminology
of micromachine technology, test methods of MEMS thin film material and
so on. Micromachine / MEMS Technical Terms can be accessed in this web.
Micromachine Center became a mirror committee for IEC WG that lead
the international standardization efforts on MEMS area in Japan. As a part
of those activities, MEMS standardization roadmaps had been set and announced
in April 2007. The roadmaps consists of two part. One is the road map on
process and materials. The other is on devices for automobile application
and information and communication technology application. Japan will continue
its contribution on IEC acts as a key role of international MEMS standardization.