Sputtering

0603002-199

[DEFINITION]
The ejection of atoms from a solid surface by utilizing the kinetic energy of accelerated ions.

[DESCRIPTION]
Sputtering by inert or reactive ions can be applied to various types of processing for either removing or depositing of the ejected atoms.

[References]
(4)(6)(7)(9)

[Related Terms]
Ion implantation, Vapor deposition