Micro-positioning control
0501001-122
[DEFINITION]
Control for microscopic positioning.
[DESCRIPTION]
In micromechanical systems, micro-positioning control is performed
by an actuator to drive the target system itself or the target object. Electrostatic actuators,
piezoelectric actuators, shape memory alloy actuators, magnetic fluid actuators, and pneumatic
rubber actuators are being developed for use in micro-positioning control. Actual examples of
micro-positioning control mechanisms using piezoelectric actuators include an actuator for scanning
tunneling microscopes, and a polarization control device.
[References]
(4)
[Related Terms]
Electrostatic actuator, Piezoelectric actuator, Shape memory
alloy actuator, Magnetic fluid actuator, Pneumatic rubber-actuator