LIGA process
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[DEFINITION]
An acronym for Lithographie, Galvanoformung und Abformung, the
German
for lithography, electroforming, and molding.
[DESCRIPTION]
This process was developed at the Kernforschungszentrum Karlsruhe.
While LIGA is a method of creating microstructures with a high aspect ratio by using deep
lithography based on X-rays (synchrotron radiation) and electroforming, the electroplated
microstructure can sometimes be used as a mold for plastic molding. Characteristics of the LIGA
process include the ability to mass-produce high-aspect ratio microstructures with a line width of 1
～10μm and a height of several hundreds of micrometers, to allow the use of a wide range of
materials including plastics, metals, and ceramics, and to combine with silicon semiconductor
elements, etc.
[References]
(1)(2)(3)(8)
[Related Terms]
Surface micromachining, Bulk micromachining