Integrated module

0300001-75

[DEFINITION]
A module that integrates many simple-function modules.

[DESCRIPTION]
An integrated module is a module that applies semiconductor manufacturing processes to integrate several functional modules on the same substrate. Integrated functions can include chemical sensors, mechanical sensors, electronic circuits, signal processor, and mechanisms. R&D is continuing into integrated modules as an ideal example of realizing Micro Electro Mechanical Systems (MEMS) or micromachines. One example that integrates the module on a silicon chip uses a comb actuator to make forceps grasp biological cells.

[References]
(3)

[Related Terms]
MEMS