etch stop

[DEFINITION]
technique that terminates the etching process at a controlled depth where a very low etch rate layer is formed.(IEC/2015)



[DESCRIPTION]

An etch stop is sometimes used as the termination layer of the etching process. There are two basic types of etch stop that are used in micromachining: dopant etch stop and electrochemical etch stop.



[References]


[Related Terms]