Electrostatic motor
0301121-52
[DEFINITION]
A motor that uses electrostatic force.
[DESCRIPTION]
Micromachines attracted considerable attention when a 100
μm-diameter electrostatic motor was manufactured on a silicon substrate. Since electrostatic
motors are simple and miniaturization is expected to bring improvements in the power-to-weight ratio,
much research into electrostatic motors was directed at producing actuators for micromachines that
generate rotational driving force. Examples include a variable capacitance motor, an induction-type
electrostatic micromotor fabricated, and a wobble motor. These are fabricated on the silicon
substrate by such semiconductor manufacturing technologies as etching. These actuators need to
reduce the friction that accompanies the rotational motion.
[References]
(2)(4)
[Related Terms]
Actuator, Wobble motor