CMOS MEMS

[DEFINITION]
integrated MEMS device, in which complementary metal–oxide–semiconductor (CMOS) signal-processing circuits and MEMS elements are formed on the same silicon substrate.(IEC/2015)



[DESCRIPTION]

CMOS MEMS is one form of the MEMS device that integrates CMOS signal-processing circuits and MEMS elements. Usually, the CMOS MEMS is fabricated by performing a MEMS process on the CMOS preformed wafer, and therefore it is necessary that the MEMS process does not damage the CMOS circuit.



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