Vibration sensor


:A sensor for measuring various physical or chemical quantity by sensing vibration.

Such technologies as silicon micromachining and sacrificial layer etching are used to produce structures with multiple cantilevers (oscillators), each designed with a different resonance frequency. The vibration sensors use the piezoelectric resistance effect or the piezoelectric electrical effect to detect cantilevers that resonate in accordance with external oscillation and directly output a frequency spectral. Accordingly, these vibration sensors can perform spectral analysis without Fourier transformation of the output from ordinary acceleration sensors.


[Related Terms]