Vibration sensor

0303101-216

[DEFINITION]
：A sensor for measuring various physical or chemical quantity by sensing vibration.

[DESCRIPTION]
Such technologies as silicon micromachining and sacrificial layer etching are used to produce structures with multiple cantilevers (oscillators), each designed with a different resonance frequency. The vibration sensors use the piezoelectric resistance effect or the piezoelectric electrical effect to detect cantilevers that resonate in accordance with external oscillation and directly output a frequency spectral. Accordingly, these vibration sensors can perform spectral analysis without Fourier transformation of the output from ordinary acceleration sensors.

[References]
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[Related Terms]