Variable gap electrostatic actuator 0301201-215
An actuator that uses electrostatic force with variable gap.
Variable gap electrostatic actuators are composed of cylindrical,
spherical, or other shaped rollers, stators with subdivided drive electrodes, and an insulation film
attached to the surface of the roller or stator. As variable gap electrostatic actuators are driven
by a rolling motion, the same principle as a wobble motor, friction can be minimized. Top-shaped,
cylindrical, and linear variable gap electrostatic actuators have been developed experimentally.