Vacuum infrared process 0605201-212
A photo-assisted chemical vapor deposition (CVD) using vibrational
excitation produced by infrared light.
In photo-assisted CVD, the reactants are excited by light. If
infrared rays are used, vibrational excitation occurs. Photo-assisted CVD is performed in two
stages: 1) vibrational excitation, gas heating, and thermal decomposition (thermochemical vapor
deposition), and 2) photolysis using multiphoton absorption.