Vacuum infrared process


A photo-assisted chemical vapor deposition (CVD) using vibrational excitation produced by infrared light.

In photo-assisted CVD, the reactants are excited by light. If infrared rays are used, vibrational excitation occurs. Photo-assisted CVD is performed in two stages: 1) vibrational excitation, gas heating, and thermal decomposition (thermochemical vapor deposition), and 2) photolysis using multiphoton absorption.


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