Tactile sensor


A device composed of highly integrated pressure sensors or force sensors that provides sense of touch.

A micromachined tactile sensor that utilizes the piezoresistance effect or capacitance change, has been developed. At present, the element size is in the order of ten micrometers, and higher integration and further miniaturization is being attempted. As for the pressure or force detection method, different methods of converting to change of resistance, capacitance, voltage, magnetism, light intensity , and so on are being studied.


[Related Terms]
Pressure sensor