Tactile sensor 0303102-206
A device composed of highly integrated pressure sensors or force
sensors that provides sense of touch.
A micromachined tactile sensor that utilizes the piezoresistance
effect or capacitance change, has been developed. At present, the element size is in the order of
ten micrometers, and higher integration and further miniaturization is being attempted. As for the
pressure or force detection method, different methods of converting to change of resistance,
capacitance, voltage, magnetism, light intensity , and so on are being studied.