spectroscopic ellipsometry

optical measurement method where the sample is successively irradiated with several-wavelength monochromatic light and both the thickness and the refractive index of the layers can be obtained simultaneously from the polarized reflection.(IEC/2015)


Monochromatic light from a spectroscope is linear-polarized using a polarizer. Then the light is irradiated on the thin film, and the reflected light intensity of the polarized components is measured. The thickness and the complex refractive index can be calculated from the measurement results..


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