Scanning mirror 0399212-182
A mirror that scans a light beam.
Scanning mirrors are developed for the laser printers, the scanning parts
of optical sensors, the head for optical disks, the displays and so on.
An array of scanning mirrors can be fabricated on a silicon wafer with
the actuator by micromachining technology. The scanning mirror is expected
as one of the practical applications of micromachine technology.
Semiconductor laser, Micromachining (1)