A micromachining process by forming various substances in various
microshape on the substrate surface.
Surface micromachining is a processing technique that applies for
example chemical vapor deposition (CVD) to form various thin films on the substrate and uses a mask
to perform selective removal of the substrate surface to produce movable parts and other structures.
The dissolved layer that was deposited initially is called the sacrificial layer. A typical
sacrificial layer material is phosphosilicate glass (PSG). This technology is applied to the
fabrication of micro-beams, bearings, and links, etc.
Bulk micromachining, Chemical vapor deposition (CVD)