Smart sensor 0303002-196
A sensor integrated with signal processing circuits.
A smart sensor is the combination of a sensing structure and signal
processing circuits (for purposes such as impedance conversion and thermal compensation), both
fabricated on the same chip. The primary purpose of the integration is to minimize the noise and
drift of the signal during transmission. Additionally, intelligent information processing is
expected. Various types of smart sensors have been developed such as accelerometers or pressure
Smart actuator, Integrated strain sensor