Silicon process


A generic term for ultra-precise processing technologies for silicon.

While the silicon process is broadly divided into surface micromachining and bulk micromachining, most of the technologies involved are the same. The silicon process starts with layer work and continues to a patterning process, microassembly, annealing, and packaging. Many technologies such as deposition, diffusion, chemical corrosion, and lithography are combined as working technologies. A feature of the silicon process is the ability to use batch processing on large wafers for mass-fabrication of components.


[Related Terms]
Surface micromachining, Bulk micromachining