Silicon process 0601021-193
A generic term for ultra-precise processing technologies for silicon.
While the silicon process is broadly divided into surface
micromachining and bulk micromachining, most of the technologies involved are the same. The silicon
process starts with layer work and continues to a patterning process, microassembly, annealing, and
packaging. Many technologies such as deposition, diffusion, chemical corrosion, and lithography are
combined as working technologies. A feature of the silicon process is the ability to use batch
processing on large wafers for mass-fabrication of components.
Surface micromachining, Bulk micromachining