An actuator that generates rotary motion.
Requirements of rotary actuators that fit for micromachines are: 1)
High output torque with compact configuration. 2) Less friction. 3) Retaining position without
energy supply. Various types of rotary actuator such as piezoelectric, electromagnetic,
electrostatic, pneumatic, hydraulic ,and shape memory alloy actuators have been proposed.
Actuator, Shape memory alloy