A device that resonates near the natural frequency for specific purposes.

The resonator here is a device in which an oscillator formed by silicon micromachining technology is resonated by electrostatic force or electromagnetic force and so on. Physical properties such as stress in the oscillator vary by subtle changes of the ambient environment such as temperature, pressure, and concentration , which cause change of the resonant frequency. For the high sensitivity, resonators are used for various vibration sensors. For example, the infrared sensor exploits the changes of resonant frequency by relaxation of stress of the oscillator when it absorbs infrared rays and undergoes thermal expansion, while the pressure sensor exploits the changes in resonant frequency caused by the strain of the oscillator under pressure.


[Related Terms]
Vibration sensor, Pressure sensor