physical vapour deposition process, PVD process


production process of a thin film mainly by using physical evaporation.(IEC/2015)


The physical vapour deposition process mainly constitutes a thin film by using vacuum evaporation of atomic species or sputter deposition using single or multiple targets in inert or reactive atmospheres (e.g. RF-magnetron sputtering, ion beam sputtering, molecular beam epitaxy, laser ablation).


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