A sensor for measuring pressure of fluids.
A typical pressure sensor consists of the pressure receiver
diaphragm, fabricated by the silicon micromachining technology, especially the anisotropic etching
technique, and the strain gauge built on the substrate. At present, the pressure sensor is the most
successful micromachine in business terms, and has been used in automobile engine. High market
demand is expected in the future, and research and development is brisk for further miniaturization,
precision improvement, reliability enhancement, higher integration and so on. Apart from the strain
gauge type, electrostatic type and vibration type sensors have been also developed.