Polymer processing


A process for polymers such as photoresists using laser-assisted etching.

As polymers have a low heat resistance and excellent chemical resistance, they cannot be thermally processed with a laser. Accordingly, in an oxygen atmosphere active oxygen ions and radicals are generated by the photochemical effect of an excimer laser, and the chemical reaction between these active particles and the polymers is used for processing. This method uses polymers not only as the mask for etching but as the etching target itself.


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