A polymer material produced from reaction of pyromellitic
and aromatic diamine.
Polyimide is popular as a material for making microscopic
structures for its features below: 1) Easily made into film on a spin coater 2) Excellent heat
resistance as a plastic material 3) Low elasticity 4) Electrically insulating. Among the
micromachine components made of polyimide as prototypes, there are an electrostatic linear actuator
consisting of a square polyimide plate suspended by four thin beams and strip electrodes on the
upper and lower sides, and a thermal expansion cantilever actuator consisting of polyimide film and
a metal micro heater.
Electrostatic linear actuator