A polymer material produced from reaction of pyromellitic dianhydride and aromatic diamine.

Polyimide is popular as a material for making microscopic structures for its features below: 1) Easily made into film on a spin coater 2) Excellent heat resistance as a plastic material 3) Low elasticity 4) Electrically insulating. Among the micromachine components made of polyimide as prototypes, there are an electrostatic linear actuator consisting of a square polyimide plate suspended by four thin beams and strip electrodes on the upper and lower sides, and a thermal expansion cantilever actuator consisting of polyimide film and a metal micro heater.


[Related Terms]
Electrostatic linear actuator