Piezoelectric linear actuator0301202-167
An actuator that uses piezoelectric elements to generate linear
The piezoelectric elements are used to develop various linear
actuators due to their advantage of the high thrust force and quick response, despite of the small
displacement. In Scanning Probe Microscope (SPM), displacements of a stacked piezoelectric element
are directly used for high resolution positioning. To make strokes longer, various methods are
studied, for instance, inchworm mechanism.
Actuator, Piezoelectric element, Piezoelectric actuator, Linear