An actuator that uses piezoelectric material.
Piezoelectric actuators are classified into the single-plate,
bimorph, and stacked types, and the popular material is lead zirconate titanate (PZT). The features
are: 1) Quick response, 2) Great output force per volume, 3) Ease of miniaturization because of
simple structure, 4) Narrow displacement range for easier micro-displacement control, and 5) High
effeciency of energy conversion. Piezoelectric actuators are used for the actuators for
micromachines, such as ultrasonic motor, micro-displacement stage, fan, pump, and speaker. An
applied example is a piezoelectric actuator for traveling mechanism which moves by the resonance
vibration of a piezoelectric bimorph, and a micro-positioner piezoelectric actuator which amplifies
displacements of a stacked piezoelectric device by a lever.
Piezoelectric element, Ultrasonic motor