A generic term for devices that measure the physical or chemical quantitiy, and are produced by micromachining.

In micromachines, the first field to be developed and realized is that of the micro-sensor. Microsensors include mechanical quantity sen-sors (measuring pressure, acceleration, tactile senses, displacement, etc.), chemical quantity sensors (measuring ions, oxygen, etc.), electrical quantity sensors (measuring magnetism, current, etc.), biosensors, and optical sensors. In many micro-sensors, the detecting section containing the mechanism is integrated with the electronic circuits. The advantages of micro-sensors are: 1) less environmental disruption, 2) the ability to measure local states of small areas, 3) integration with circuits, and 4) less operating power.


[Related Terms]
Smart sensor