Micropump
0302211-124
[DEFINITION]
A mechanical device that pressurizes and thus transport small amount
of fluid.
[DESCRIPTION]
There are many examples of micro-pumps mainly fabricated on silicon
or glass, for instance, and using micromachining technology to form a diaphragm together with an
actuator. Application examples include a diaphragm-type pump with a microscopic check valve driven
by a piezoelectric element, and an integrated pump using a thermal expansion actuator along with a
micro-heater. Pumps discharging and sucking liquids by deforming a diaphragm actuated by a stacked
piezoelectric actuator can control the rate by changing the frequency of the actuator drive. In
addition, pulsation damping pumps can control the liquid flow with high accuracy by using a dual
pump along with a synchronous buffer pump.
[References]
(1)(2)(3)(4)
[Related Terms]
Diaphram structure, Piezoelectric actuator