A mechanical device that pressurizes and thus transport small amount of fluid.

There are many examples of micro-pumps mainly fabricated on silicon or glass, for instance, and using micromachining technology to form a diaphragm together with an actuator. Application examples include a diaphragm-type pump with a microscopic check valve driven by a piezoelectric element, and an integrated pump using a thermal expansion actuator along with a micro-heater. Pumps discharging and sucking liquids by deforming a diaphragm actuated by a stacked piezoelectric actuator can control the rate by changing the frequency of the actuator drive. In addition, pulsation damping pumps can control the liquid flow with high accuracy by using a dual pump along with a synchronous buffer pump.


[Related Terms]
Diaphram structure, Piezoelectric actuator