machining process used to realize microscopic structures.

Micromachining is a general term including wide-ranging machining technologies for microscopic structures. Depending on the contexts, however, the term can be used with more specific meanings, as follows:
a) machining processes derived from the semiconductor manufacturing technologies, used to realize microscopic structures for the production of micromachines or MEMS,
b) machining processes used to realize microscopic structures of micromachines or MEMS, applying conventional machining technologies such as cutting and grinding.


[Related Terms]
Micro-electro-discharge machining, Micro-cutting and grinding