Micromachine technology
0000001-135
[DEFINITION]
A generic term for technologies relating to micromachines.
[DESCRIPTION]
Micromachine-related technologies are extremely diversified. In
the fundamental technology field, micromachine technologies include: design, material, processing,
functional element, system control, energy supply, bonding and assembly, electrical circuit, and
evaluation as well as micro-science and engineering such as thermodynamics and tribology in a
micro-scale. Micromachine technologies have two aspects: technologies required to realize
micromachines, and technologies required to apply such technical seeds to other industrial fields.
[References]
(1)(2)(3)(4)(5)(6)(7)
[Related Terms]
Micromachine, MST, MEMS