MEMS

0000001-97

[DEFINITION]
An acronym standing for "micro electro mechanical systems" and a generic term for technology relating to micro-sized electromechanical systems.

[DESCRIPTION]
The term MEMS is mostly used in the United States. In general this term means technologies to realize micro structures, sensors, and actuators by using silicon process technology though it is occasionally used in some other meanings.

[References]
(2)

[Related Terms]
Micromachine technology, MST