A generic term for microscopic structure that constructs microscopic objects such as microscopic sensors, actuators, gear train, link structures, and turbines.

Microscopic sensors, actuators, gear train, link mechanisms, and turbines have been experimentally produced by IC fabrication process and by the LIGA (Lithographie-Galvanoformung-Abformung) process. These experimental products are the origin of micromachine-technology and have stimulated the development of today's micromachine research. Currently, much R&D is being carried out into production technologies of three-dimensional micro-structures with a high aspect ratio.


[Related Terms]
LIGA process