A generic term for microscopic structure that constructs microscopic
objects such as microscopic sensors, actuators, gear train, link structures, and turbines.
Microscopic sensors, actuators, gear train, link mechanisms, and turbines
have been experimentally produced by IC fabrication process and by the
LIGA (Lithographie-Galvanoformung-Abformung) process. These experimental
products are the origin of micromachine-technology and have stimulated
the development of today's micromachine research. Currently, much R&D
is being carried out into production technologies of three-dimensional
micro-structures with a high aspect ratio.