Micro-positioning control


Control for microscopic positioning.

In micromechanical systems, micro-positioning control is performed by an actuator to drive the target system itself or the target object. Electrostatic actuators, piezoelectric actuators, shape memory alloy actuators, magnetic fluid actuators, and pneumatic rubber actuators are being developed for use in micro-positioning control. Actual examples of micro-positioning control mechanisms using piezoelectric actuators include an actuator for scanning tunneling microscopes, and a polarization control device.


[Related Terms]
Electrostatic actuator, Piezoelectric actuator, Shape memory alloy actuator, Magnetic fluid actuator, Pneumatic rubber-actuator