Material science for the microscopic world of micromachines.
Some of the material properties of structures and functional
materials relating to micromachines differ from those of conventional structures and materials.
For example, their materials are greatly affected by such factors as individual crystalline grains,
flaws, the absorbed layer on the surface. Physical properties, anisotropy, and other behavior at
the microscopic level can also differ from the macro level. Research and development has been
carried out into new functional materials for microsensors and microactuators. These new materials
include both organic and inorganic materials, and are tested for biocompatibility if necessary.
Micro-material scienｃe has not yet been fully systematized as an academic field.
Breaking strength, Actuator