A microscopic fluid analyzing device integrated with multiple
chemical sensors and mechanical elements such as valves and pumps.
Research is focusing on microdevices for integrated chemical
analyzing systems combining semiconductor ion sensors, pH sensors, PCO2 sensors, and other
components made by silicon processing. A device for sampling and analyzing small volumes of fluid
such as blood is being researched and developed by integrating pumps, valves, sensors, and circuit
blocks. However, there are many problems to overcome, for instance, biocompatibility with organisms,
the interface, sampling of minute specimens, and pre-treatment for plasma separation.
Ion sensitive field effect transistor (ISFET)