A micromachining process using the discharge between
and the material.
While this technique uses the same principle as conventional
electro-discharge machining, micro-energy discharge technology and micro-electrode production
technology differ. That is, the floating capacitance between the electrode and the material being
processed must be reduced and the electrode must be miniaturized by such methods as wire
electro-discharge grinding (WEDG). With the WEDG method, electrodes with a diameter of 2.5 μm can
be prepared and micro-holes can be processed with this electrode.