LIGA process


An acronym for Lithographie, Galvanoformung und Abformung, the German for lithography, electroforming, and molding.

This process was developed at the Kernforschungszentrum Karlsruhe. While LIGA is a method of creating microstructures with a high aspect ratio by using deep lithography based on X-rays (synchrotron radiation) and electroforming, the electroplated microstructure can sometimes be used as a mold for plastic molding. Characteristics of the LIGA process include the ability to mass-produce high-aspect ratio microstructures with a line width of 1 ~10μm and a height of several hundreds of micrometers, to allow the use of a wide range of materials including plastics, metals, and ceramics, and to combine with silicon semiconductor elements, etc.


[Related Terms]
Surface micromachining, Bulk micromachining