Laser-assisted etching


An etching process that uses a laser beam to both thermally activate the material and excite an etchant.

As laser-assisted etching uses a laser as an excitation beam to activate a photochemical reaction, the high power required in general laser (thermal) machining is not necessary. The concentration of ions or plasma increases locally and the temperature of the material rises, increasing the reaction rate in the etching process. Laser-assisted etching is also generally suitable for hard-to-process materials like ceramics. This process is seen as a combined process of maskless patterning by laser and high-precision etching.


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