A module that integrates many simple-function modules.
An integrated module is a module that applies semiconductor manufacturing
processes to integrate several functional modules on the same substrate.
Integrated functions can include chemical sensors, mechanical sensors,
electronic circuits, signal processor, and mechanisms. R&D is continuing
into integrated modules as an ideal example of realizing Micro Electro
Mechanical Systems (MEMS) or micromachines. One example that integrates
the module on a silicon chip uses a comb actuator to make forceps grasp