Integrated module


A module that integrates many simple-function modules.

An integrated module is a module that applies semiconductor manufacturing processes to integrate several functional modules on the same substrate. Integrated functions can include chemical sensors, mechanical sensors, electronic circuits, signal processor, and mechanisms. R&D is continuing into integrated modules as an ideal example of realizing Micro Electro Mechanical Systems (MEMS) or micromachines. One example that integrates the module on a silicon chip uses a comb actuator to make forceps grasp biological cells.


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