Integrated chemical analyzing system0303101-72
A micro-chemical analyzing system integrating chemical sensors and
fluid control elements.
A blood gas monitoring microsystem and an integrated chromatography
system are manufactured as integrated chemical analyzing systems. A blood gas monitoring
microsystem analyzes the pH of blood samples obtained intermittently from the body. One example of
such a system integrates a microvalve, a pH ion sensitive field effect transistor (pHISFET), and
other components on a silicon substrate. In the integrated chromatography system separation and
analysis components are based on the difference in the adsorption among sample components. This
system is commercially available in a shape that a number of valves, sensors, and columns (tubes)
are integrated on a silicon substrate.