Ion beam-assisted machining


An ion beam machining that introduces etching gas to assist the processing.

Ion beam machining uses a physical action (sputtering) produced by the kinetic energy of the ions of inert gas. In some cases, there are problems such as a slow removal rate or surface damage of the sample. Ion beam-assisted machining solves these problems by introducing active gas for etching into the reaction chamber to add etching action based on a chemical reaction.


[Related Terms]
Ion beam machining