IC fabrication process


A series of processes to manufacture semiconductor integrated circuits.

Normally, the manufacture of semiconductor ICs involves many stages, including circuit design, pattern layout, mask manufacture, wafer processing, wafer testing, assembly, and reliability testing. Wafer processing, which creates the circuit on the wafer as part of the wafer structure, is the main stage. This stage combines such subprocesses as photolithography, thin-film formation, etching, doping, and epitaxial growth in a single cycle, and the IC chip is completed through tens of cycles.


[Related Terms]
Silicon process