IC fabrication process0601001-70
A series of processes to manufacture semiconductor integrated
Normally, the manufacture of semiconductor ICs involves many stages,
including circuit design, pattern layout, mask manufacture, wafer processing, wafer testing,
assembly, and reliability testing. Wafer processing, which creates the circuit on the wafer as part
of the wafer structure, is the main stage. This stage combines such subprocesses as
photolithography, thin-film formation, etching, doping, and epitaxial growth in a single cycle, and
the IC chip is completed through tens of cycles.