Hybrid integration technology0601022-68
A technology for creating a device by mounting one or more discrete
components with integrated circuits at a high density on a substrate or chip.
In order to utilize a system to the utmost limit that drives
micromachine components with micro-actuators, it is crucial to integrate both sensors and logic
circuits with the actuators. This integration enables autonomous control where various information
from sensors is collected, processed by the logical circuits, and then used to control the actuators.
Without this operation, information from all the sensors and actuators would have to be sent to the
macro world once, processed there, and then returned to the micro-world again. Such transfer system
is not practical if many actuators are to be used simultaneously in the micro-world, because the
amount of information to be exchanged would be excessive.