A sensor for measuring the flow rate of fluid.
Micromachining technology has realized a device for measuring the
micro-flow of gases or liquids. To measure the flow of gases, a hot-wire flowmeter was realized by
using the temperature change of the heater caused by changes in the flow. To measure the flow of
liquids, a differential pressure-type flowmeter is used; the pressure drop at a micro-orifice is
detected by a piezoelectric pressure sensor on a silicon diaphragm prepared by micromachining
Microsensor, Diaphram structure