Film electrostatic actuator0301211-62
A thin-film actuator that uses electrostatic force.
Film electrostatic actuator is driven by the electostatic force
between a stator and a slider. It is possible to design an actuator which has no electrode on the
slider by using inductive charge on high-resistance film. This type of actuator does not need to
adjust the position or angle between the stator and the slider, and manufacture and assembly are
simple even if the electrode pitch is minute. There is also little friction because a levitation
force is generated at drive actuation, obviating the need for a bearing mechanism. Conversely, when
the actuator stops, attraction occurs, and a strong holding force arises. The actuator is
characteristic in that it can be manufactured in a thin, flexible film form. Also, because force is
generated from the entire surface of the slider, the generated force is strong, and high output can
be obtained by lamination of the films. In addition, movement of three degrees of freedom can be
realized by using multiple pairs of electrodes in different directions.