Electron probe microanalysis (EPMA)1006202-48
A method that uses electron beams or X-rays for observation of a
solid surface and quantitative analysis of constituent elements.
EPMA uses the characteristic X-rays radiated from the specimen when
it is irradiated with an electron beam or X-rays, to carry out spectroscopic analysis of elements.
Two-dimensional elementary analysis on the surface of the specimen is performed by scanning the
surface with the electron beam or X-rays. Excellent accuracy of quantitative analysis is obtained
by the established quantification correction method, although sensitivity to lighter elements is not