Electron probe microanalysis (EPMA)


A method that uses electron beams or X-rays for observation of a solid surface and quantitative analysis of constituent elements.

EPMA uses the characteristic X-rays radiated from the specimen when it is irradiated with an electron beam or X-rays, to carry out spectroscopic analysis of elements. Two-dimensional elementary analysis on the surface of the specimen is performed by scanning the surface with the electron beam or X-rays. Excellent accuracy of quantitative analysis is obtained by the established quantification correction method, although sensitivity to lighter elements is not good.


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