Electron beam machining0603102-47
A machining process using electron beam.
Electron beam machining is the heat process technique for welding
and removing material where electron beam is irradiated. Electrons are small enough to penetrate
through the surface of solid materials and kinetic energy is converted to heat inside, and affected
area of the surface of the workpiece is melted or evaporated. Usually it is not easy to confine
processed region within a sub-micrometer area by heat process, but a high resolution can be obtained
by exploiting the electronic reaction such as in the photoresist. Application examples of electron
beam machining are micro-boring by a focused beam as thin as several micrometers, and welding that
causes extremely low thermal deformation utilizing narrow and deep penetration of the electron beam.
Electron beam lithography, Ion beam machining