Electron beam machining


A machining process using electron beam.

Electron beam machining is the heat process technique for welding and removing material where electron beam is irradiated. Electrons are small enough to penetrate through the surface of solid materials and kinetic energy is converted to heat inside, and affected area of the surface of the workpiece is melted or evaporated. Usually it is not easy to confine processed region within a sub-micrometer area by heat process, but a high resolution can be obtained by exploiting the electronic reaction such as in the photoresist. Application examples of electron beam machining are micro-boring by a focused beam as thin as several micrometers, and welding that causes extremely low thermal deformation utilizing narrow and deep penetration of the electron beam.


[Related Terms]
Electron beam lithography, Ion beam machining