An actuator that uses electromagnetic force.
Magnet and coil winding are the major element for
micro-electromagnetic actuators. For sub-milimeter or smaller magnetic rotors for
micro-electromagnetic devices, thin film magnets fabricated by sputtering are useful. High-energy
products and larger thickness are needed for the thin film magnets in order to raise the power of
the devices. On the other hand, research into devices based on electromagnetic force focuses on
those with plane structures such as axial gap types, because it is difficult to wind the coil around
the cylindrical stator used for radial gap type microdevices. With regard to efficiency, radial gap
types have an advantage, but an appropriate process for winding the coil around the cylindrical
stator must be developed.