A technology for growing a single-crystal thin film according to the crystal structures of the substrate.

Forming thin-film crystals conforming to the crystalline orientation of the substrate results in a tightly bonded thin film with stable electrical characteristics. Epitaxy is divided into solid phase, liquid phase, and vapor phase processes, depending on the state of the substance to form a film. The first epitaxy was realized in liquid phase. Then molecular beam epitaxy (MBE) technology was developed as one kind of vapor phase growth capable of controlling the film thickness at a single atomic layer using ultra-high vacuum technology. Superlattices have been produced by this method.


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