Electrostatic motor


A motor that uses electrostatic force.

Micromachines attracted considerable attention when a 100 μm-diameter electrostatic motor was manufactured on a silicon substrate. Since electrostatic motors are simple and miniaturization is expected to bring improvements in the power-to-weight ratio, much research into electrostatic motors was directed at producing actuators for micromachines that generate rotational driving force. Examples include a variable capacitance motor, an induction-type electrostatic micromotor fabricated, and a wobble motor. These are fabricated on the silicon substrate by such semiconductor manufacturing technologies as etching. These actuators need to reduce the friction that accompanies the rotational motion.


[Related Terms]
Actuator, Wobble motor