A motor that uses electrostatic force.
Micromachines attracted considerable attention when a 100
μm-diameter electrostatic motor was manufactured on a silicon substrate. Since electrostatic
motors are simple and miniaturization is expected to bring improvements in the power-to-weight ratio,
much research into electrostatic motors was directed at producing actuators for micromachines that
generate rotational driving force. Examples include a variable capacitance motor, an induction-type
electrostatic micromotor fabricated, and a wobble motor. These are fabricated on the silicon
substrate by such semiconductor manufacturing technologies as etching. These actuators need to
reduce the friction that accompanies the rotational motion.
Actuator, Wobble motor